Automated inspection microscope for 300 mm silicon substrates and tooling

The National Research Council of Canada has a requirement for an automated optical microscope, dedicated to the inspection of microstructured silicon wafers up to 300 mm in diameter, either on their own or mounted in support custom tools. The key requirements for this system are a design with wide clearance on three sides, enabling large parts to be handled, and DIN EN ISO 14644-1 certification (ISO5 class cleanroom).