Ultra-High Vacuum (UHV) System

The University of Calgary (UCalgary) intends to purchase from Angstrom Engineering an integrated, multi-module ultra-high vacuum (UHV) thin-film deposition and processing cluster platform, including delivery, installation, and commissioning. UCalgary’s qLab requires shadow evaporation to fabricate sub-nanometer Josephson junctions with high film uniformity on a static, tilted 150 mm substrate. Angstrom’s system incorporates proprietary Aeres® software, an integrated “Swing-Away” Quartz Crystal M